Microelectromechanical systems
(Redirected from MEMS design)
MEMS or Micro Electro Mechanical Systems are sensors and actuators based on certain mechanical principles integrated with electronic circuits (signal transduction unit) for input and output on micro scale.
Learning projects and materials
[edit | edit source]Resources
[edit | edit source]- Search for Microelectromechanical systems at Wikiversity
- Wikipedia: Microelectromechanical systems
- Wikipedia: MEMS sensor generations
- Wikipedia: SUGAR (MEMS Simulator)
- Wikipedia: MEMS thermal actuator
- Wikipedia: Accelerometer
- Wikipedia: RF MEMS
- Wikipedia: Vibrating structure gyroscope
- Wikipedia: Microtechnology
- Wikipedia: Lab-on-a-chip